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Available
for the PhotoMap 3D and ZoomSurf 3D profilers. |
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Dynamic
characterization of vibrating MEMS allowing a precise measurement
of in-plane and out-of-plane vibration mode shapes and deformations. |
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Frequency
range from 100 Hz to 2 MHz. |
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Fully
automated measurement technique. |
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Measurement
of amplitude and vibration phase maps for direct comparaison with
finite element simulation results. |
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Excitation
electronics provide electrostatic (voltage), piezo electric (voltage)
or thermal (current) actuation of MEMS. |
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For
more information download the data
sheet or
the Optical profilers documentation A4 / US
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