|
 |
Sub-nanometer
vertical resolution (down to 0.1 nm) at all magnifications |
|
|
|
Non-contact
measurements allowing accurate and repeatable results |
|
|
|
Large
working area |
|
|
|
Automated
step height and surface flattening function |
|
|
|
Sub-nanometric
roughness measurements |
|
|
|
Compact
|
|
|
|
For
more information download the data
sheet |
