Profilometry
Profilometry
Optical Profilometry High-lightSub-nanometer resolution
Non-contact measurements by optical interferometry with vertical resolution down to 0.1 nm
Fast results
Full field 3D measurements in just a few seconds
Versatile
Reflectivity 1% to 100% : Transparent films (Glass), Silicon, Metal
Non-contact measurements
All measurements are non destrucitive, repeatable and require no sample preparation
System stability and linearity
Measurement are related to wavelenght. Highly stable metrology thanks to its design including a capacitive sensor feedback loop.
ZOOMSURF
3D |
PHOTOMAP
3D |
MICROSURF
3D |
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Fully
automated optical profiling system for research and production applications |
Cost
effective optical profiler with large customisation capability for industrial
and educational applications |
Optical
profilers build on microscope for research and industrial laboratories |
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CYBERSURF
3D |
MEMS
SOLUTIONS |
MIRAU
OBJECTIVE
&
VACUUM BOX |
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Solution
for fully automated control on sillicon wafer |
An
option for Fogale profilers enabling stroboscopic measurement with nanometer
accuracy |
Cost
effective optical profiler with large customisation capability for industrial
and educational applications |
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