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VACUUM
BOX & MIRAU INTERFEROMETRIC OBJECTIVES |
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Stroboscopic
interferometric microscopy combined with vacuum box is the perfect
tool for MEMS testing, mechanical measurements
(quality factor, rising/falling time), and MEMS behaviour testing
(reliability) under temperature. |
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Main
advantage of Fogale Vacuum box
Device characterization under controlled environmental contitions:
- Vacuum
- Gaz partial pressure
- Temperature
User-customizable I/O ports
Easy sample handling (PLCC 68 pin or user configurable) |
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Fogale
developped specific glass-compensated, long-working
distance, interferometric objectives for 3D mode shape
measurement across the vacuum box glass plate:
- Vacuum Box |
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MEMS
Solution : High performance software for In-plane and out-of-plane
dynamic measurement |
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Vacuum
box and long working distance objectives are available as an option
suitable for the Photomap and Zoomsurf 3D systems, enabling dynamic
measurements under vacuum using the MEMS solution functions.
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