
|
 |
Sub-nanometer
vertical resolution (down to 0.1 nm) at all magnifications |
|
|
 |
Non-contact
measurements allowing accurate and repeatable results |
|
|
 |
All
axes motorization enabling automatic stitching of multiples fields
of view |
|
|
 |
Automated
measurement sequence |
|
|
 |
Sub-nanometric
roughness measurements |
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|
 |
Easy
to use and production-ready |
|
|
 |
Automated
step height and surface flattening functions |
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| |
For
more information download the data
sheet |