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    Optical sensors and systems


    LISE System
    Distance / thickness metrology


    NIXUS System
    Fiber optics extensometers


    SKIN VIEW
    Optical coherence tomography

    T-MAP System
    Wafer thickness



    LISE-ED 4
    Measurement range: 4 mm
    Accuracy: ±1 µm
    Acquisition frequency: 100 Hz
    Optical power: 150 µW at 1310 nm (eye safety) or 16 mW
    PC Interface: PCI, PXI, PCMCIA board
    Red laser beam for visualisation
    LISE-LS 40
    Measurement range: 40 mm
    Accuracy: ±1 µm
    Measurement time: 1-5 s
    Optical power: 150 µW at 1310 nm (eye safety) or 16 mW
    PC Interface: PCI, PXI, PCMCIA board
    Red laser beam for visualisation

    LISE-LS 200
    Measurement range: 200 mm
    Accuracy: ±1 µm
    Measurement time: 1-10 s
    Optical power: 16 mW
    PC Interface: PCI, PXI, PCMCIA board
    Red laser beam for visualisation

    LISE-LS 400
    Measurement range: 400 mm
    Accuracy: ±1 µm
    Measurement time: 1 - 20 s
    Optical power: 16 mW at 1310 nm
    PC Interface: PCI, PXI, PCMCIA board
    Red laser beam for visualisation
    LISE LI 600
    Measurement range: 600 mm optical thickness
    Accuracy: ±100 nm over100 mm of thickness
    Measurement time: 30 sec
    Optical power: up to 16 mW
    PC Interface: PCI, PXI, PCMCIA board
    Light source: Superliminescent Diode, emitting at 1.31 µm
     
    COLLIMATORS
    - Miniaturised (f 3,3 mm)
    - Standard (f 12,5 mm)
    - Precisely adjustable focus with graduation (f 44 mm)
    Options:
    - long measuring distances
    - reinforced for customised applications