Measurement types
Nanopositioning and Ultra-Fine Motion Sensing
Sub-nanometer resolution and stability for scientific, optical and embedded systems
The challenge
Achieving ultra-precise motion sensing and control requires technology capable of resolving motions below the nanometer scale. Key challenges include:
- Maintaining measurement stability under temperature drift or vibrations
- Resolving motion of flexures, voice coils or piezoelectric elements
- Operating in vacuum or cryogenic environments without calibration
- Tracking tip/tilt or piston motion in dynamic and segmented systems
Our technical response
FOGALE Sensors has developed and deployed systems capable of:
- Nanometric motion feedback for voice coil and piezoelectric actuators
- Tip/tilt control for adaptive optics, segmented mirrors (e.g. ELT)
- Embedded solutions for monitoring of nanometric motion in extreme environments
- Capacitive and inductive probes with sub-nanometer linearity
- Signal conditioning with long-term drift compensation and dynamic tracking
- Sensor systems used in ground-based telescopes and scientific beamlines
Proven applications
- Reliable feedback for actuator control at nanometric scale
- High thermal stability, vacuum and cryo-compatible systems
- Easy integration in OEM devices or metrology systems
- Custom sensor geometries for tip/tilt, piston or linear control
- Proven in optical, research, astronomy and scientific applications
Why FOGALE Sensors?
TILTRA : Capacitive or inductive angular displacement sensors
LYSENO : Capacitive sub-micrometric distance measurement systems